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WIPO: Inventors in California Develop Specimen Defects Binning Systems

2008-11-29

GENEVA, Nov. 29 - Jason Z. Lin, Xing Chu, Kenong Wu, and Sharon Mccauley, all from California, have developed specimen defects binning systems.

According to an abstract posted by the World Intellectual Property Organization, in the present invention "methods and systems for binning defects detected on a specimen are provided. One method includes comparing a test image to reference images. The test image includes an image of one or more patterned features formed on the specimen pr . . .

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WIPO: Inventors in California Develop Specimen Defects Binning Systems

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