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German Inventors Develop Substrate Sculpting Device Analyzation System

Copyright © Targeted News Service 2008
2008-10-27
ALEXANDRIA, Va., Oct. 27 -- Juergen Frosien of Riemerling, Germany, and Stefan Lanio of Erding, Germany, have developed a analyzing system for a charged particle beam device .

According to the abstract released by the U.S. Patent & Trademark Office: "The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the bea . . .

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Copyright Targeted News Service 2008