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Japanese Inventor Develops Reflected Light Intensity Ratio Measuring Device

2008-10-27

ALEXANDRIA, Va., Oct. 27 -- Hirotsugu Kaihori of Kyoto, Japan, has developed a device for measuring light energy absorption ratio.

According to the abstract released by the U.S. Patent & Trademark Office: "A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally lai . . .

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Japanese Inventor Develops Reflected Light Intensity Ratio Measuring Device

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