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WIPO: Inventors in California Develop Alternative Fuels for Extreme Ultraviolet Light Source

2008-11-29

GENEVA, Nov. 29 - Norbert R. Bowering, Oleh Khodykin, Alexander N. Bykanov, and Igor V. Fomenkov, all from San Diego, have developed an alternative fuels for extreme ultraviolet (EUV) light source.

According to an abstract posted by the World Intellectual Property Organization, in the present invention an "EUV light source is disclosed which may comprise at least one optical element having a surface, such as a multi-layer collector mirror; a laser source generating a laser beam; . . .

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WIPO: Inventors in California Develop Alternative Fuels for Extreme Ultraviolet Light Source

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